Spanier Co-PI on $1.1M NSF Grant

Published on Tuesday August 10, 2010

Associate professor Jonathan Spanier is a Co-PI on a joint National Science Foundation (NSF) project to improve Drexel's Microfabrication Facility (MFF).

Professor Moses Noh (PI, Associate Professor of Mechanical Engineering and Mechanics), along with co-PIs Professors Kenneth Barbee (Associate Professor in the School of Biomedical Engineering, Science and Health Systems), Jason Baxter (Assistant Professor of Chemical and Biological Engineering), Spanier, and Ying Sun (Assistant Professor of Mechanical Engineering and Mechanics) have received a $1.1M three-year award for their project "Upgrade and Renovation of Drexel Microfabrication Facility."

This effort seeks to upgrade and renovate the MFF to support rapidly growing sponsored and unsponsored research activities and to facilitate the integration of researchers. The MFF currently houses a number of microfabrication instruments such as a mask aligner, inductively-coupled plasma etcher, e-beam/filament evaporators, and an optical profilometer.  However, currently this facility is not a classified cleanroom facility, which is essential for micro- and nanofabrication processes.  The project will include upgrading of the MFF to a cleanroom (Photolithography Area - Class 100, General Process Area - Class 1000), expanding of Gowning/Maintenance/Storage Area, and the installation of state-of-the-art cleanroom fixtures. 

Tagged as Grants Jonathan Spanier National Science Foundation